微尖（）

我们在微尖制造方面的技术诀窍允许实现具有不同功能的峰值。这使我们能够生产导电硅微尖端或光学透明微型尖端。根据材料和制造工艺的不同，尖端半径可以达到几纳米。除了简单的尖端之外，我们还能够提供带有附加涂层的微尖端，这些涂层可以再次在zui顶端打开。这使我们能够生产光学透明的尖端，其光孔径明显小于光的波长。此外，可以制造具有导电芯和电气屏蔽的同轴尖端。

Our technological know-how in the manufacturing of micro-tips permits the realization of peaks with different functions. This allows us to produce electrically conductive silicon micro tips or optically transparent micro tips. Depending on the material and manufacturing process tip radii of a few nanometers can be achieved. Beyond the simple tip, we are able to provide micro tips with addonal coatings that can be opened at the very apex again. This enables us to produce optically transparent tips which have an aperture for the light, which is significantly smaller than the wavelength of light. In addon, coaxial tips can be fabricated which have an electrically conductive core and an electrical shield.

规格：

材料：硅、硅氧、硅3N4
涂层：二氧化二、金属
半径：几纳米
高度：几个 10um


硅微尖端		带光圈的微尖端		同轴微尖端

应用：

结合其他工艺，我们可以在薄悬臂上制造微尖端，这些悬臂用作扫描探针显微镜中的传感器。

.由于尖端半径小，当施加电压时，可以实现强电场。这使得用作电场发射器的应用成为可能。此外，添加更多涂层的选项提供了在电子光学领域使用尖端的可能性。

Application:

In combination with other processes, we can fabricate microtips on thin cantilevers, which are used as sensors in scanning probe microscopy.

. Due to the small tip radii strong electric fields can be achieved when an electrical voltage is applied. This enables applications in the use as electrical field emitter. Also the option to add further coatings offers the possibility to use the tips in the field of electron optics.

悬臂上的硅微尖端